2
Event

The 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Start Date : 2015/05/26

Termination date : 2015/05/29

City : San Diego

Country : CANADA

Website : ‎http://eipbn.org/

Description :

The EIPBN Conference is recognized as the foremost international meeting dedicated to lithographic science and technology and its application to micro and nanofabrication techniques. The conference brings together engineers and scientists from industries and universities from all over the world to discuss recent progress and future trends. The important topics:

Micro- and Nanolithography

  • Electron and Ion beam lithography
  • Optical and Extreme UV (EUV) lithography
  • Nano-imprint lithography
  • Maskless and high throughput direct write lithography
  • 3D micro and nanolithography
  • Resists and lithographic support materials
  • Mask, template and stencil fabrication
  • Directed self-assembly
  • Tip-based and scanning probe lithography
  • Electron and Ion beam sources and optics
  • Large area nanoscale patterning
  • Simulation and modeling of patterning technologies
  • Lithography for packaging and 3D integration

Process and Metrology Technologies

  • Electron, ion and photon beam stimulated etching and deposition
  • Ion beam microscopy including Ga, He, Li and novel sources
  • Multibeam and high throughput imaging instruments
  • Nanoparticle and nanotube assembly and placement
  • Advanced pattern transfer concepts
  • Aberration corrected electron beam instruments
  • Process simulation and modeling
  • Nanomanipulation and precision placement
  • Advanced scanning probe and tip-based imaging
  • Processing for novel 2D materials (MoSs, grapheme

Applications and Emerging Topics

  • Nanoelectronics and Bio-nanoelectronics
  • Nanostructured Interfaces to Biology
  • Patterned media
  • High density solid state storage & nonvolatile memory devices
  • Nanophotonics and plasmonics
  • Nanobiology and nanomedicine
  • Micro- and nano-fluidics
  • Carbon-based nanodevices (CNTs & graphene)
  • Nanofabrication for energy sources
  • Micro- and nano-scale mechanical devices and MEMs
  • DNA origami and biologically inspired assembly